International Chemical Safety Cards TRICHLOROSILANE ICSC: 0591 TRICHLOROSILANE Trichloromonosilane Silicochloroform Cl3HSi Molecular mass: 135.47 CAS # 10025-78-2 RTECS # VV5950000 ICSC # 0591 UN # 1295 EC # 014-001-00-9 TYPES OF HAZARD/ EXPOSURE ACUTE HAZARDS/ SYMPTOMS PREVENTION FIRST AID/ FIRE FIGHTING FIRE Extremely flammable. Gives off irritating or toxic fumes (or gases) in a fire. NO open flames, NO sparks, and NO smoking. Water in large amounts, foam, powder, carbon dioxide. EXPLOSION Vapour/air mixtures are explosive. Closed system, ventilation, explosion-proof electrical equipment and lighting. Do NOT use compressed air for filling, discharging, or handling.   EXPOSURE AVOID ALL CONTACT! IN ALL CASES CONSULT A DOCTOR! INHALATION Sore throat. Cough. Burning sensation. Shortness of breath. Laboured breathing. Symptoms may be delayed (see Notes). Ventilation, local exhaust, or breathing protection. Fresh air, rest. Half-upright position. Refer for medical attention. SKIN Pain. Redness. Blisters. Skin burns. Serious frostbite. Protective gloves. Protective clothing. Remove contaminated clothes. Rinse skin with plenty of water or shower. Refer for medical attention. EYES Pain. Redness. Severe deep burns. Loss of vision. Face shield, or eye protection in combination with breathing protection. First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor. INGESTION Burning sensation. Abdominal pain. Shock or collapse. Do not eat, drink, or smoke during work. Rinse mouth. Do NOT induce vomiting. Refer for medical attention. SPILLAGE DISPOSAL STORAGE PACKAGING & LABELLING Evacuate danger area! Consult an expert! Ventilation. Collect leaking and spilled liquid in sealable containers as far as possible. Absorb remaining liquid in dry sand or inert absorbent and remove to safe place (extra personal protection: chemical protection suit including self-contained breathing apparatus). Fireproof. Separated from food and feedstuffs. See Chemical Dangers. Cool. Dry. Well closed. Ventilation along the floor. Do not transport with food and feedstuffs. F symbol R: 15-17 S: (2-)24/25-43 UN Hazard Class: 4.3 UN Subsidiary Risks: 3 and 8 UN Packing Group: I SEE IMPORTANT INFORMATION ON BACK ICSC: 0591 Prepared in the context of cooperation between the International Programme on Chemical Safety & the Commission of the European Communities © IPCS CEC 1993

International Chemical Safety Cards TRICHLOROSILANE ICSC: 0591 I M P O R T A N T D A T A PHYSICAL STATE; APPEARANCE: COLOURLESS, VOLATILE, FUMING LIQUID , WITH PUNGENT ODOUR. PHYSICAL DANGERS: The vapour is heavier than air, and may travel along the ground; distant ignition possible. CHEMICAL DANGERS: The substance may spontaneously ignite on contact with air. The substance decomposes on heating on burning producing toxic and corrosive fumes including hydrogen chloride. Reacts violently with water to form hydrogen chloride, evolving heat. Reacts violently with strong oxidants, strong acids, bases, amines, alcohols, acetone, ammonia. Attacks many metals in presence of water releasing hydrogen. OCCUPATIONAL EXPOSURE LIMITS (OELs): TLV not established. ROUTES OF EXPOSURE: The substance can be absorbed into the body by inhalation of its vapour and by ingestion. INHALATION RISK: No indication can be given about the rate in which a harmful concentration in the air is reached on evaporation of this substance at 20°C. EFFECTS OF SHORT-TERM EXPOSURE: Tear drawing. The substance is corrosive to the eyes, the skin and the respiratory tract. Corrosive on ingestion. Inhalation of its vapour may cause lung oedema (see Notes). Exposure at high level may result in death. The effects may be delayed. Medical observation is indicated. PHYSICAL PROPERTIES Boiling point: 31.8°C Melting point: -126.5°C Relative density (water = 1): 1.34 Solubility in water: reaction Vapour pressure, kPa at 20°C: 67 Relative vapour density (air = 1): 4.7 Relative density of the vapour/air-mixture at 20°C (air = 1): 3.3 Flash point: -14°C o.c. Auto-ignition temperature: 185°C Explosive limits, vol% in air: 1.2-90.5

ENVIRONMENTAL DATA
N O T E S
Reacts violently with fire extinguishing agents such as water. The symptoms of lung oedema often do not become manifest until a few hours have passed and they are aggravated by physical effort. Rest and medical observation are therefore essential. Immediate administration of an appropriate spray, by a doctor or a person authorized by him/her, should be considered. Transport Emergency Card: TEC (R)-43G11 NFPA Code: H3; F4; R2; W

ADDITIONAL INFORMATION
ICSC: 0591 TRICHLOROSILANE © IPCS, CEC, 1993

IMPORTANT LEGAL NOTICE: Neither the CEC or the IPCS nor any person acting on behalf of the CEC or the IPCS is responsible for the use which might be made of this information. This card contains the collective views of the IPCS Peer Review Committee and may not reflect in all cases all the detailed requirements included in national legislation on the subject. The user should verify compliance of the cards with the relevant legislation in the country of use.